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Growth and Properties of Ion Beam Synthesized Si/CoxN1-xSi2/Si (111) Structures

dc.contributor.authorWu, Ming Fang
dc.contributor.authorDe Wachter, Jo
dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorPattyn, Hugo
dc.contributor.authorLangouche, G.
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorBender, Hugo
dc.contributor.authorTemst, K.
dc.contributor.authorWuyts, Bart
dc.contributor.authorBruynseraede, Y.
dc.date.accessioned2021-09-29T12:53:46Z
dc.date.available2021-09-29T12:53:46Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/467
dc.sourceIIOimport
dc.titleGrowth and Properties of Ion Beam Synthesized Si/CoxN1-xSi2/Si (111) Structures
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorPattyn, Hugo
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage1201
dc.source.endpage1203
dc.source.journalJ. Appl. Phys.
dc.source.volume75
imec.availabilityPublished - imec


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