Growth and Properties of Ion Beam Synthesized Si/CoxN1-xSi2/Si (111) Structures

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Authors
Wu, Ming Fang; De Wachter, Jo; Van Bavel, Mieke; Pattyn, Hugo; Langouche, G.; Vanhellemont, Jan; Bender, Hugo; Temst, K.; Wuyts, Bart; Bruynseraede, Y.
Journal
J. Appl. Phys.
Volume
75
Title
Growth and Properties of Ion Beam Synthesized Si/CoxN1-xSi2/Si (111) Structures
Publication type
Journal article
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