Publication:
Growth and Properties of Ion Beam Synthesized Si/CoxN1-xSi2/Si (111) Structures
Date
dc.contributor.author | Wu, Ming Fang | |
dc.contributor.author | De Wachter, Jo | |
dc.contributor.author | Van Bavel, Mieke | |
dc.contributor.author | Pattyn, Hugo | |
dc.contributor.author | Langouche, G. | |
dc.contributor.author | Vanhellemont, Jan | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Temst, K. | |
dc.contributor.author | Wuyts, Bart | |
dc.contributor.author | Bruynseraede, Y. | |
dc.contributor.imecauthor | Van Bavel, Mieke | |
dc.contributor.imecauthor | Pattyn, Hugo | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.date.accessioned | 2021-09-29T12:53:46Z | |
dc.date.available | 2021-09-29T12:53:46Z | |
dc.date.issued | 1994 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/467 | |
dc.source.beginpage | 1201 | |
dc.source.endpage | 1203 | |
dc.source.journal | J. Appl. Phys. | |
dc.source.volume | 75 | |
dc.title | Growth and Properties of Ion Beam Synthesized Si/CoxN1-xSi2/Si (111) Structures | |
dc.type | Journal article | |
dspace.entity.type | Publication | |
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