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Substrate hole current origin after oxide breakdown

dc.contributor.authorRasras, Mahmoud
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDegraeve, Robin
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T13:38:04Z
dc.date.available2021-10-14T13:38:04Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4687
dc.sourceIIOimport
dc.titleSubstrate hole current origin after oxide breakdown
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage537
dc.source.endpage540
dc.source.conferenceIEDM Technical Digest
dc.source.conferencedate10/12/2000
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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