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Electrodeposition for the synthesis of microsystems
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Electrodeposition for the synthesis of microsystems
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Date
2000
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ruythooren, Wouter
;
Attenborough, Karen
;
Beerten, Steven
;
Merken, Patrick
;
Fransaer, J.
;
Beyne, Eric
;
Van Hoof, Chris
;
De Boeck, Jo
;
Celis, Jean-Pierre
Journal
Journal of Micromechanics and Microengineering
Abstract
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2012
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Acq. date: 2026-02-25
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Views
2012
since deposited on 2021-10-14
2
last month
1
last week
Acq. date: 2026-02-25
Citations