Electrodeposition for the synthesis of microsystems

View/open

4710.pdf (1.095Mb)

Metadata

Show full item record

Authors

Ruythooren, Wouter; Attenborough, Karen; Beerten, Steven; Merken, Patrick; Fransaer, J.; Beyne, Eric; Van Hoof, Chris; De Boeck, Jo; Celis, Jean-Pierre

Issue

2

Journal

Journal of Micromechanics and Microengineering

Volume

10

Title

Electrodeposition for the synthesis of microsystems

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles