Show simple item record

Electrodeposition for the synthesis of microsystems

dc.contributor.authorRuythooren, Wouter
dc.contributor.authorAttenborough, Karen
dc.contributor.authorBeerten, Steven
dc.contributor.authorMerken, Patrick
dc.contributor.authorFransaer, J.
dc.contributor.authorBeyne, Eric
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorDe Boeck, Jo
dc.contributor.authorCelis, Jean-Pierre
dc.date.accessioned2021-10-14T13:41:51Z
dc.date.available2021-10-14T13:41:51Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4712
dc.sourceIIOimport
dc.titleElectrodeposition for the synthesis of microsystems
dc.typeJournal article
dc.contributor.imecauthorRuythooren, Wouter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorDe Boeck, Jo
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage101
dc.source.endpage107
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue2
dc.source.volume10
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
4710.pdf
Size:
1.095Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record