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Influence of hydrogen on losses in silicon oxynitride planar optical waveguides

dc.contributor.authorSahu, B. S.
dc.contributor.authorAgnihotri, Om Prakash
dc.contributor.authorJain, Suresh
dc.contributor.authorMertens, Robert
dc.contributor.authorKato, I.
dc.date.accessioned2021-10-14T13:42:18Z
dc.date.available2021-10-14T13:42:18Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4715
dc.sourceIIOimport
dc.titleInfluence of hydrogen on losses in silicon oxynitride planar optical waveguides
dc.typeJournal article
dc.contributor.imecauthorMertens, Robert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageL11
dc.source.endpageL14
dc.source.journalSemiconductor Science and Technology
dc.source.issue3
dc.source.volume15
imec.availabilityPublished - open access


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