Influence of hydrogen on losses in silicon oxynitride planar optical waveguides

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Authors

Sahu, B. S.; Agnihotri, Om Prakash; Jain, Suresh; Mertens, Robert; Kato, I.

Issue

3

Journal

Semiconductor Science and Technology

Volume

15

Title

Influence of hydrogen on losses in silicon oxynitride planar optical waveguides

Publication type

Journal article

Embargo date

9999-12-31

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