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Influence of hydrogen on losses in silicon oxynitride planar optical waveguides
Publication:
Influence of hydrogen on losses in silicon oxynitride planar optical waveguides
Date
2000
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sahu, B. S.
;
Agnihotri, Om Prakash
;
Jain, Suresh
;
Mertens, Robert
;
Kato, I.
Journal
Semiconductor Science and Technology
Abstract
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1931
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1931
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations