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Influences of hydrogen on losses in silicon oxynitride planar optical waveguides

dc.contributor.authorSahu, B. S.
dc.contributor.authorAgnihotri, Om Prakash
dc.contributor.authorJain, Suresh
dc.contributor.authorMertens, Robert
dc.contributor.authorNijs, Johan
dc.contributor.authorIsamu, K.
dc.date.accessioned2021-10-14T13:42:27Z
dc.date.available2021-10-14T13:42:27Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4716
dc.sourceIIOimport
dc.titleInfluences of hydrogen on losses in silicon oxynitride planar optical waveguides
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Robert
dc.source.peerreviewno
dc.source.beginpage438
dc.source.endpage443
dc.source.conferenceProceedings of the International Conference on the Physics of Semiconductor Devices; December 1999; New Delhi, India.
dc.source.conferencelocation
imec.availabilityPublished - imec


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