dc.contributor.author | Schitthelm, F. | |
dc.contributor.author | Völk, P. | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | Szlufcik, Jozef | |
dc.date.accessioned | 2021-10-14T13:44:18Z | |
dc.date.available | 2021-10-14T13:44:18Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4729 | |
dc.source | IIOimport | |
dc.title | Quasi continuous A-SIN:H-PECVD system with high throughput rate for solar cell AR-coating | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.imecauthor | Szlufcik, Jozef | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1609 | |
dc.source.endpage | 1612 | |
dc.source.conference | 16th European Photovoltaic Solar Energy Conference. Proceedings | |
dc.source.conferencedate | 1/05/2000 | |
dc.source.conferencelocation | Glasgow UK | |
imec.availability | Published - open access | |