dc.contributor.author | Sedky, Sherif | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Roussel, Philippe | |
dc.date.accessioned | 2021-10-14T13:45:33Z | |
dc.date.available | 2021-10-14T13:45:33Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4737 | |
dc.source | IIOimport | |
dc.title | Effect of deposition and annealing temperature on the structural and mechanical properties of poly SiGe | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Roussel, Philippe | |
dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
dc.source.peerreview | no | |
dc.source.conference | MRS Spring Meeting 2000. Symposium A:Amorphous and Heterogeneous Silicon Thin Films - 2000; 24-28 April 2000; San Francisco, Ca, | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |