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Effect of deposition and annealing temperature on the structural and mechanical properties of poly SiGe

dc.contributor.authorSedky, Sherif
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorCaymax, Matty
dc.contributor.authorRoussel, Philippe
dc.date.accessioned2021-10-14T13:45:33Z
dc.date.available2021-10-14T13:45:33Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4737
dc.sourceIIOimport
dc.titleEffect of deposition and annealing temperature on the structural and mechanical properties of poly SiGe
dc.typeOral presentation
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting 2000. Symposium A:Amorphous and Heterogeneous Silicon Thin Films - 2000; 24-28 April 2000; San Francisco, Ca,
dc.source.conferencelocation
imec.availabilityPublished - imec


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