dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Vanhaelemeersch, Serge | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-14T13:45:52Z | |
dc.date.available | 2021-10-14T13:45:52Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4739 | |
dc.source | IIOimport | |
dc.title | Effect of HF solution on the porous structure of low-k SICOH film | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
dc.source.peerreview | no | |
dc.source.conference | Advanced Metallization Conference; October 2000; San Diego, Ca, USA. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |