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Investigation of the formation of sputtered oxide clusters with the laser assisted sputtered neutral mass spectrometry technique (LASNMS)

dc.contributor.authorVlekken, J.
dc.contributor.authorPolus, D.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Schepper, Luc
dc.date.accessioned2021-10-14T13:49:41Z
dc.date.available2021-10-14T13:49:41Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4764
dc.sourceIIOimport
dc.titleInvestigation of the formation of sputtered oxide clusters with the laser assisted sputtered neutral mass spectrometry technique (LASNMS)
dc.typeProceedings paper
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage341
dc.source.endpage344
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference
dc.source.conferencedate5/09/1999
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - open access


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