Integration of hydrogen silsesquioxane (HSQ) material for sub-0.25μm CMOS technology
dc.contributor.author | Teng, Gao | |
dc.date.accessioned | 2021-10-14T13:53:14Z | |
dc.date.available | 2021-10-14T13:53:14Z | |
dc.date.issued | 2000-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4786 | |
dc.source | IIOimport | |
dc.title | Integration of hydrogen silsesquioxane (HSQ) material for sub-0.25μm CMOS technology | |
dc.type | PHD thesis | |
dc.source.peerreview | no | |
imec.availability | Published - imec | |
imec.internalnotes | Thesis Advisor : Prof. Dr. Ir. G. Declerck |
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