Publication:
Integration of hydrogen silsesquioxane (HSQ) material for sub-0.25μm CMOS technology
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1912 since deposited on 2021-10-14
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Acq. date: 2025-12-18
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Views
1912 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2025-12-18
Citations