Publication:
Integration of hydrogen silsesquioxane (HSQ) material for sub-0.25μm CMOS technology
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1913 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-24
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Statistics
Views
1913 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-24
Citations