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Probing nitride thin films in 3-dimensions using a variable energy electron beam

dc.contributor.authorTrager-Cowan, C.
dc.contributor.authorMcColl, D.
dc.contributor.authorSweeney, F.
dc.contributor.authorGrimson, S. T. F.
dc.contributor.authorTreguer, J. F.
dc.contributor.authorMohammed, A.
dc.contributor.authorMiddleton, P. G.
dc.contributor.authorManson-Smith, S. K.
dc.contributor.authorO'Donnell, K. P.
dc.contributor.authorVan der Stricht, Wim
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorDemeester, Piet
dc.contributor.authorWu, Ming Fang
dc.contributor.authorVantomme, Andre
dc.contributor.authorZubia, D.
dc.contributor.authorHersee, S. D.
dc.date.accessioned2021-10-14T13:55:00Z
dc.date.available2021-10-14T13:55:00Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4797
dc.sourceIIOimport
dc.titleProbing nitride thin films in 3-dimensions using a variable energy electron beam
dc.typeJournal article
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.imecauthorDemeester, Piet
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecMoerman, Ingrid::0000-0003-2377-3674
dc.contributor.orcidimecDemeester, Piet::0000-0003-2810-3899
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageW5.10
dc.source.journalMRS Internet Journal of Nitride Semiconductor Research
dc.source.volume5, Suppl. 1
dc.identifier.urlhttp://nsr.mij.mrs.org/5S1/W5.10/
imec.availabilityPublished - open access
imec.internalnotesPaper from MRS Fall Meeting 1999


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