Probing nitride thin films in 3-dimensions using a variable energy electron beam

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Authors
Trager-Cowan, C.; McColl, D.; Sweeney, F.; Grimson, S. T. F.; Treguer, J. F.; Mohammed, A.; Middleton, P. G.; Manson-Smith, S. K.; O'Donnell, K. P.; Van der Stricht, Wim; Moerman, Ingrid; Demeester, Piet; Wu, Ming Fang; Vantomme, Andre; Zubia, D.; Hersee, S. D.
Journal
MRS Internet Journal of Nitride Semiconductor Research
Volume
5, Suppl. 1
Title
Probing nitride thin films in 3-dimensions using a variable energy electron beam
Publication type
Journal article
Embargo date
9999-12-31
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