Probing nitride thin films in 3-dimensions using a variable energy electron beam

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Author(s)

Trager-Cowan, C.

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Grimson, S. T. F.

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Middleton, P. G.

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Manson-Smith, S. K.

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O'Donnell, K. P.

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Van der Stricht, Wim

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Moerman, Ingrid

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Demeester, Piet

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Vantomme, Andre

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Journal

MRS Internet Journal of Nitride Semiconductor Research

Metrics

1920 since deposited on 2021-10-14

Acq. date: 2025-10-24