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Analysing antenna ratio dependence of plasma charging damage with Weibull breakdown statistics
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Authors
Van den Bosch, Geert
;
Creusen, Martin
;
Degraeve, Robin
;
Kaczer, Ben
;
Groeseneken, Guido
Conference
Proceedings of the 30th European Solid-State Device Research Conference - ESSDERC
Title
Analysing antenna ratio dependence of plasma charging damage with Weibull breakdown statistics
Publication type
Proceedings paper
Embargo date
9999-12-31
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