Anomalously weak antenna ratio dependence of plasma process-induced damage

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Authors
Van den Bosch, Geert; Creusen, Martin; Degraeve, Robin; Kaczer, Ben; Groeseneken, Guido
Conference
Proceedings of the 5th International Symposium on Plasma Process-Induced Damage - P2ID
Title
Anomalously weak antenna ratio dependence of plasma process-induced damage
Publication type
Proceedings paper
Embargo date
9999-12-31
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