Demonstration of electrocoagulation as a viable technique to treat (cu-)CMP wastes

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Authors
Van Hoeymissen, Jan; Trenkler, Daniela; Van den Broeck, Kristel; Van Hoornick, Nausikaa; Heyns, Marc
Conference
7th International Semiconductor Environment, Safety and Health Conference - ISESH
Title
Demonstration of electrocoagulation as a viable technique to treat (cu-)CMP wastes
Publication type
Oral presentation
Embargo date
9999-12-31
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