Electrocoagulation as a viable technique to treat (cu-)CMP wastes

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Authors
Van Hoeymissen, Jan; Trenkler, Daniela; Van den Broeck, Kristel; Van Hoornick, Nausikaa; Heyns, Marc
Conference
Proceedings of the 9th International Semiconductor Manufacturing Symposium - ISSM
Title
Electrocoagulation as a viable technique to treat (cu-)CMP wastes
Publication type
Proceedings paper
Embargo date
9999-12-31
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