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Comparative study on the efficiency and thermal stability of various and reflective metal coatings

dc.contributor.authorDe Bosschere, Wilmert
dc.contributor.authorNoury, F.
dc.date.accessioned2021-09-29T12:54:50Z
dc.date.available2021-09-29T12:54:50Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/485
dc.sourceIIOimport
dc.titleComparative study on the efficiency and thermal stability of various and reflective metal coatings
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage493
dc.source.endpage495
dc.source.conference11th VLSI Multilevel Interconnect Conference - VMIC
dc.source.conferencedate07/06/1994
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access


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