dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | De Witte, Hilde | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Janssens, Tom | |
dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Brijs, Bert | |
dc.contributor.author | Houssa, Michel | |
dc.date.accessioned | 2021-10-14T14:08:44Z | |
dc.date.available | 2021-10-14T14:08:44Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4881 | |
dc.source | IIOimport | |
dc.title | Characterization of (ultra)thin dielectrica | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Houssa, Michel | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
dc.source.peerreview | no | |
dc.source.conference | Quantitative Surface Analysis-11; 3-7 July 2000; Surrey, UK. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |