dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Callewaert, Sven | |
dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Duhayon, Natasja | |
dc.contributor.author | Xu, Mingwei | |
dc.contributor.author | Trenkler, Thomas | |
dc.contributor.author | Clarysse, Trudo | |
dc.date.accessioned | 2021-10-14T14:08:55Z | |
dc.date.available | 2021-10-14T14:08:55Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4882 | |
dc.source | IIOimport | |
dc.title | Towards routine, quantitative two-dimensional carrier profiling with Scanning Spreading Resistance Microscopy | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Duhayon, Natasja | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.source.peerreview | no | |
dc.source.conference | International Workshop on Metrology for ULSI ; 2000; NIST. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |