Authors

Vanhaelemeersch, Serge; Struyf, Herbert; Alaerts, Carine; Baklanov, Mikhaïl; Lepage, Muriel

Conference

5th International Symposium on Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability Issues

Title

Dry etch and clean aspects for advanced integration of low k dielectrics

Publication type

Oral presentation