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TXRF analysis of trace metals in thin silicon nitride films
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Authors
Vereecke, Guy
;
Arnauts, Sophia
;
Verstraeten, Karel
;
Schaekers, Marc
;
Heyns, Marc
Conference
8th Conference on Total Reflection X-Ray Fluorescence Analysis and Related Methods
Title
TXRF analysis of trace metals in thin silicon nitride films
Publication type
Meeting abstract
Embargo date
9999-12-31
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