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Conference contributions
TXRF analysis of trace metals in thin silicon nitride films
Publication:
TXRF analysis of trace metals in thin silicon nitride films
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Date
2000
Meeting abstract
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4910.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Arnauts, Sophia
;
Verstraeten, Karel
;
Schaekers, Marc
;
Heyns, Marc
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Abstract
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1864
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Acq. date: 2026-01-08
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Metrics
Views
1864
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-08
Citations