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Investigation of fluorine in dry ultrathin silicon oxides
Publication:
Investigation of fluorine in dry ultrathin silicon oxides
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Date
2000
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Röhr, Erika
;
Carter, Richard
;
Conard, Thierry
;
De Witte, Hilde
;
Heyns, Marc
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1927
since deposited on 2021-10-14
Acq. date: 2026-01-25
Citations
Statistics
Views
1927
since deposited on 2021-10-14
Acq. date: 2026-01-25
Citations