Investigation of fluorine in dry ultrathin silicon oxides

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Authors
Vereecke, Guy; Röhr, Erika; Carter, Richard; Conard, Thierry; De Witte, Hilde; Heyns, Marc
Conference
47th International Sympsoium of the American Vacuum Society
Title
Investigation of fluorine in dry ultrathin silicon oxides
Publication type
Oral presentation
Embargo date
9999-12-31
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