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Optimisation of dHF-based cleaning recipes: to remove or not to remove a particle?
Publication:
Optimisation of dHF-based cleaning recipes: to remove or not to remove a particle?
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Date
2000
Proceedings Paper
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4933.pdf
1.77 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vos, Rita
;
Cornelissen, Ingrid
;
Meuris, Marc
;
Mertens, Paul
;
Heyns, Marc
Journal
Abstract
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1957
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-18
Citations
Metrics
Views
1957
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-18
Citations