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Irradiation effects of silicon dioxide films implanted by carbon ions
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Authors
Yu, Y. H.
;
Zhao, J.
;
Jin, S.
Conference
MRS Fall Meeting Symposium O: Ion Beam Synthesis and Processing of Advanced Materials; November 27-29, 2000; Boston, MA, USA.
Title
Irradiation effects of silicon dioxide films implanted by carbon ions
Publication type
Oral presentation
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