Authors

Zhao, Chao; Roebben, G.; Young, Edward; Bender, Hugo; Houssa, Michel; Naili, Mohamed; De Gendt, Stefan

Conference

11th Workshop on Dielectrics in Microelectronics; 13-15 November 2000; Munich, Germany.

Title

High temperature grazing incidence XRD study on in-situ crystallization in ultra-thin oxide films

Publication type

Oral presentation