Leakage current mechanisms in shallow p-n junction diodes using advanced isolation schemes

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Authors
Poyai, Amporn; Simoen, Eddy; Claeys, Cor; Rooyackers, Rita; Badenes, Gonçal
Conference
Belgische Natuurkundige Vereniging / Société Belge de Physique: General Scientific Meeting
Title
Leakage current mechanisms in shallow p-n junction diodes using advanced isolation schemes
Publication type
Meeting abstract
Embargo date
9999-12-31
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