Publication:

Probing nitride thin films in 3-dimensions using a variable energy electron beam

Date

2000

Proceedings Paper

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Files

20176.pdf 298.98 KB

Author(s)

Trager-Cowan, Carol

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Grimson, S.T.F.

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Middleton, P.G.

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Manson-Smith, S.K.

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O'Donnell, K.P.

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Van der Stricht, Wim

;

Moerman, Ingrid

;

Demeester, Piet

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;

Vantomme, Andre

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Acq. date: 2026-10-04