Browsing Articles by author "Tabata, Toshiyuki"
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3D simulation for melt laser anneal integration in FinFET's contact
Tabata, Toshiyuki; Curvers, Benoit; Huet, Karim; Chew, Soon Aik; Everaert, Jean-Luc; Horiguchi, Naoto (2020) -
Segregation and activation of Sb implanted in Si by UV nanosecond-laser-anneal-induced non-equillibrium solidification
Tabata, Toshiyuki; Raynal, Pierre-Edouard; Huet, Karim; Everaert, Jean-Luc (2020)