Browsing Articles by imec author "452a1d3245e0c6bc2051cf393b75ddc7629aea2c"
Now showing items 61-65 of 65
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Structural characterization of thin films and multilayer structures
Temst, K.; Van Bael, M.; Baert, M.; Rosseel, Erik; Bruyndoncx, V.; Strunk, C.; Verbanck, G.; Maex, Karen; Van Haesendonck, Chris; Moshchalkov, V. V.; Bruynseraede, Y.; Jonckheere, Rik; de Groot, D. G.; Koeman, N.; Griessen, R. (1996) -
Use of positive and negative chemically amplified resists in electron-beam direct-write lithography
Tritchkov, Alexander; Jonckheere, Rik; Van den hove, Luc (1995) -
Vortex configurations in a Pb/Cu microdot with a 2 x 2 antidot cluster
Puig, T.; Rosseel, Erik; Van Look, L.; Van Bael, M.J.; Moshchalkov, V. V.; Bruynseraede, Y.; Jonckheere, Rik (1998) -
Vortex interactions in 2x2 antidot clusters
Puig, T.; Rosseel, Erik; Vanlook, L.; Baert, M.; Van Bael, Marleen; Jonckheere, Rik; Moshchalkov, V. V.; Bruynseraede, Y. (1996) -
Wafer level response to mask deficiencies in 0.55-numerical aperture extreme ultraviolet photolithography
Melvin III, Lawrence S.; Jonckheere, Rik (2022)