Browsing Articles by author "Waeterloos, Joost"
Now showing items 1-4 of 4
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Barrier studies on porous silk semiconductor dielectric
Tokei, Zsolt; Iacopi, Francesca; Richard, Olivier; Waeterloos, Joost; Rozeveld, S.; Beach, E.; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen (2003) -
Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films
Martin Hoyas, Ana; Schuhmacher, Jorg; Shamiryan, Denis; Waeterloos, Joost; Besling, W.; Celis, Jean-Pierre; Maex, Karen (2004) -
Process integration induced thermodesorption from SiO2/SiLK resin dielectric based interconnects
Baklanov, Mikhaïl; Muroyama, M.; Judelewicz, Moshe; Kondoh, Eiichi; Li, H.; Waeterloos, Joost; Vanhaelemeersch, Serge; Maex, Karen (1999) -
Surface characterization of a low dielectric constant polymer-SiLK polymer, and investigation of its interface with Cu
Rajagopal, A.; Grégoire, C.; Lemaire, J. J.; Pireaux, J. J.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen; Waeterloos, Joost (1999)