Publication:

Barrier studies on porous silk semiconductor dielectric

Date

2003

Journal article

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Author(s)

;

Iacopi, Francesca

;

Richard, Olivier

;

Waeterloos, Joost

;

;

;

Mebarki, Bencherki

;

;

;

Journal

Microelectronic Engineering

Metrics

2004 since deposited on 2021-10-15

1last month

Acq. date: 2026-01-09