Barrier studies on porous silk semiconductor dielectric

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Authors

Tokei, Zsolt; Iacopi, Francesca; Richard, Olivier; Waeterloos, Joost; Rozeveld, S.; Beach, E.; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen

Issue

2_4

Journal

Microelectronic Engineering

Volume

70

Title

Barrier studies on porous silk semiconductor dielectric

Publication type

Journal article

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