Browsing Articles by author "Kachel, Krzysztof"

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Sequential infiltration synthesis for line edge roughness mitigation of EUV resist

Baryshnikova, Marina; De Simone, Danilo; Knaepen, Werner; Kachel, Krzysztof; Chan, BT; Paolillo, Sara; Maes, Jan; De Roest, David; Rincon Delgadillo, Paulina; Vandenberghe, Geert (2017)