Browsing Articles by author "Cabannes-Boue, Benjamin"

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Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-chi Block Copolymers

Pound-Lana, Gwenaelle; Bezard, Philippe; Petit-Etienne, Camille; Cavalaglio, Sebastien; Cunge, Gilles; Cabannes-Boue, Benjamin; Fleury, Guillaume; Chevalier, Xavier; Zelsmann, Marc (2021)
Multifunctional Top-Coats Strategy for DSA of High-chi Block Copolymers

Chevalier, Xavier; Correia, Cindy Gomes; Pound-Lana, Gwenaelle; Bezard, Philippe; Serege, Matthieu; Petit-Etienne, Camille; Gay, Guillaume; Cunge, Gilles; Cabannes-Boue, Benjamin; Nicolet, Celia; Navarro, Christophe; Cayrefource, Ian; Mueller, Marcus; Hadziioannou, Georges; Iliopoulos, Ilias; Fleury, Guillaume; Zelsmann, Marc (2021)