Browsing Articles by imec author "fd6378929c38271422c82371ee20dd6fa980f935"
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Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
Nagano, Fuya; Iacovo, Serena; Phommahaxay, Alain; Inoue, Fumihiro; Sleeckx, Erik; Beyer, Gerald; Beyne, Eric; De Gendt, Stefan (2020) -
Origin of Voids at the SiO2/SiO2 and SiCN/SiCN Bonding Interface Using Positron Annihilation Spectroscopy and Electron Spin Resonance
Nagano, Fuya; Inoue, F.; Phommahaxay, Alain; Peng, Lan; Chancerel, Francois; Naser, Hasan; Beyer, Gerald; Uedono, A.; Beyne, Eric; De Gendt, Stefan; Iacovo, Serena (2023) -
Void Formation Mechanism Related to Particles During Wafer-to-Wafer Direct Bonding
Nagano, Fuya; Iacovo, Serena; Phommahaxay, Alain; Inoue, Fumihiro; Chancerel, Francois; Naser, Hasan; Beyer, Gerald; Beyne, Eric; De Gendt, Stefan (2022)