MEMS and submicron CMOS
| dc.contributor.author | Baert, Kris | |
| dc.date.accessioned | 2021-10-14T16:36:26Z | |
| dc.date.available | 2021-10-14T16:36:26Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5027 | |
| dc.source | IIOimport | |
| dc.title | MEMS and submicron CMOS | |
| dc.type | Oral presentation | |
| dc.source.peerreview | no | |
| dc.source.conference | Micromachine Summit; 30 April - 2 May 2001; Freiburg, Germany. | |
| dc.source.conferencelocation | ||
| imec.availability | Published - imec |
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