Ion-beam induced oxidation of GaAs and AlGaAs

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Authors

Alay, Josep Lluis; Vandervorst, Wilfried; Bender, Hugo

Issue

7

Journal

J. Appl. Phys.

Volume

77

Title

Ion-beam induced oxidation of GaAs and AlGaAs

Publication type

Journal article

Embargo date

9999-12-31

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