Characterisation of Cu surface cleaning by downstream N2/H2 plasma

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Authors
Baklanov, Mikhaïl; Shamiryan, Denis; Beyer, Gerald; Conard, Thierry; Vanhaelemeersch, Serge; Maex, Karen
Conference
Advanced Metallization Conference 2000
Title
Characterisation of Cu surface cleaning by downstream N2/H2 plasma
Publication type
Proceedings paper
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