Publication:

Characterisation of Cu surface cleaning by downstream N2/H2 plasma

Date

2001

Proceedings Paper

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Author(s)

Baklanov, Mikhaïl

;

Shamiryan, Denis

;

;

Conard, Thierry

;

Vanhaelemeersch, Serge

;

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1911 since deposited on 2021-10-14

Acq. date: 2026-06-18