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Ion-beam induced oxidation of GaAs and AlGaAs

dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-09-29T13:04:09Z
dc.date.available2021-09-29T13:04:09Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/503
dc.sourceIIOimport
dc.titleIon-beam induced oxidation of GaAs and AlGaAs
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3010
dc.source.endpage22
dc.source.journalJ. Appl. Phys.
dc.source.issue7
dc.source.volume77
imec.availabilityPublished - open access


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