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Chemical analysis on Focused Ion Beam cross-sections by scanning Auger microscopy

dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-14T16:37:02Z
dc.date.available2021-10-14T16:37:02Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5050
dc.sourceIIOimport
dc.titleChemical analysis on Focused Ion Beam cross-sections by scanning Auger microscopy
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.conferenceEuropean Focused Ion Beam Users Group Meeting - EFUG; 1 October 2001; Arcachon, France.
dc.source.conferencelocation
imec.availabilityPublished - imec


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