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Focused ion beam analysis of Cu/low-k metallisation structures

dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-14T16:37:03Z
dc.date.available2021-10-14T16:37:03Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5051
dc.sourceIIOimport
dc.titleFocused ion beam analysis of Cu/low-k metallisation structures
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.conferenceAdvances in Focused Ion Beam Microscopy - FIB; March 2001; Oxford, UK.
dc.source.conferencelocation
imec.availabilityPublished - imec


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