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Analytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structures

dc.contributor.authorArmigliato, A.
dc.contributor.authorBalboni, R.
dc.contributor.authorCorticelli, F.
dc.contributor.authorMalvezzi, F.
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T13:04:10Z
dc.date.available2021-09-29T13:04:10Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/505
dc.sourceIIOimport
dc.titleAnalytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structures
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage400
dc.source.endpage406
dc.source.journalMaterials Science and Technology
dc.source.volume11
imec.availabilityPublished - open access
imec.internalnotesPaper from the 1st International Conference on Materials for Microelectronics. October 17-19, 1994. Barcelona, Spain.


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