dc.contributor.author | Beyne, Eric | |
dc.contributor.author | Van Hoof, Rita | |
dc.contributor.author | Webers, Tomas | |
dc.contributor.author | Brebels, Steven | |
dc.contributor.author | Rossi, S. | |
dc.contributor.author | Lechleiter, F. | |
dc.contributor.author | Di Ianni, M. | |
dc.contributor.author | Ostmann, A. | |
dc.date.accessioned | 2021-10-14T16:37:35Z | |
dc.date.available | 2021-10-14T16:37:35Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5066 | |
dc.source | IIOimport | |
dc.title | High density interconnect substrates using multilayer thin film technology on laminate substrates (MCM-SL/D) | |
dc.type | Journal article | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.imecauthor | Van Hoof, Rita | |
dc.contributor.imecauthor | Webers, Tomas | |
dc.contributor.imecauthor | Brebels, Steven | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | Brebels, Steven::0000-0002-1568-0286 | |
dc.source.peerreview | no | |
dc.source.beginpage | 36 | |
dc.source.endpage | 42 | |
dc.source.journal | Microelectronics International | |
dc.source.issue | 3 | |
dc.source.volume | 18 | |
imec.availability | Published - imec | |